Improvement of Electron Emission Stability of Mo-tip FEAs by DLC Coating

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概要

• 論文の詳細を見る

• We have studied the improvement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55V to 30V by 20 nm DLC coating and maximum emission current was increased from 166μA to 831μA. Also the gate voltage required to get the anode current of 0.1(μA/emitter) decreases from 77V to 48V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of non-coated Mo FEAs.

• 社団法人電子情報通信学会の論文
• 1997-02-14

著者

• Ju B

  Korea Institute Of Science And Technology

• Ju Byeong

  Division Of Electronics And Information Technology Kist

• Jang Jin

  Department of Physics, Kyunghee University Hoigi-dong

• Oh Myung

  Division of Electronics and Information Technology, KIST

• Lee Y

  Korea Inst. Sci. And Technol. Seoul Kor

• Jung Jae

  Division of Electronics and Information Technology

• Lee Yun

  Division of Electronics and Information Technology

• Jang J

  Kyunghee University

• Lee Y

  Samsung Electronics Co. Ltd. Kyungki‐do Kor

• Oh M

  Korea Institute Of Science And Technology

• Oh M

  Samsung Electronics Kyoungi‐do Kor

• Oh Myung

  Division Of Electronics And Information Technology Kist

• Oh Myung

  Division Of Applied Science And Engineering

• Jang Jin

  Department Of Physics Kyunghee University

• Jang Jin

  Department Of Biochemistry School Of Medicine Kyungpook National University

• Jang J

  Korea Institute Of Science And Technology

• JUNG Jae

  Division of Electromagnetic Metrology, Korea Research Institute of Stands and Science

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