Influences of Indium Tin Oxide Layer on the Properties of IF Magnetron-Sputtered (BaSr)TiO_3 Thin Filmson Indium Tin Oxide-Coated Glass Substrate

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概要

• 論文の詳細を見る

• Nearly stoichiometric ((Ba+Sr)/Ti=1.08-1.09) and optically transparent (BaSr)TiO_3 thin films were deposited on an indium tin oxide (ITO)-coated glass substrate by means of rf magnetron sputtering for their application to the insulating layer of an electroluminescent flat panel display. The influence of the ITO layer on the properties of(BaSr)TiO_3 thin films deposited on the ITO-coated substrate was investigated. The ITO layer did not affect the crystallographic orientation of (BaSr)TiO_3 thin film, but enhanced the grain growth. Another effect of the ITO layer on (BaSr)TiO_3 thin films was the interdiffusion phenomenon, which was studied by means of secondary Tonmass spectrometry (SIMS). As the substrate temperature increased, interdiffusion intensified at the interface not only between the grown film and ITO layer but also between the ITO layer and base glass substrate. The refractive index (n_f) of (BaSr)TiO_3 thin film deposited on a bare glass substrate was 2.138-2.286, as a function of substrate temperature.

• 社団法人応用物理学会の論文
• 1993-06-15

著者

• Kim Tae

  Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology

• Oh Myung

  Division of Electronics and Information Technology, KIST

• KIM Chong

  Department of Applied Physics, Tohoku University

• Oh Myung

  Division Of Applied Science And Engineering

• Oh Myung

  Division Of Applied Science And Engineering Kist

• Kim C

  Korea Advanced Inst. Sci. And Technol. Taejon Kor

• Kim T

  Korea Inst. Of Sci. And Technol. Seoul Kor

• Kim Tae

  Department Of Anesthesia And Pain Medicine School Of Medicine Pusan National University

• Kim Chong

  Department Of Applied Physics Tohoku University

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