DLC 〓〓〓 〓〓 〓〓〓〓〓-〓 〓〓〓〓〓〓〓 〓〓 〓〓 〓〓〓 〓〓〓 〓〓 〓〓
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概要
- 論文の詳細を見る
We have studied the improvement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55V to 30V by 20 nm DLC coating and maximum emission current was increased from 166μA to 831μA. Also the gate voltage required to get the anode current of 0.1 (μA/emitter) decreases from 77V to 48V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of non-coated Mo FEAs.
- 社団法人映像情報メディア学会の論文
- 1997-02-14
著者
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Jang Jin
Department of Physics, Kyunghee University Hoigi-dong
-
Jang Jin
Department Of Biochemistry School Of Medicine Kyungpook National University
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Jung Jaehoon
Division Of Electronics And Information Technology
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Ju ByeongKwon
Division of Electronics and Information Technology
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Lee YunHi
Division of Electronics and Information Technology
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Oh MyungHwan
Division of Electronics and Information Technology
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