Numerical Investigation of Defect Printability in Extreme Ultraviolet (EUV) Reflector : Ru/Mo/Si Multilayer System

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-07-30

著者

• AHN Jinho

  Department of Materials Science and Engineering, Hanyang University

• OH Hye-Keun

  Physics Department, Hanyang University

• KANG In-Yong

  CPRC, Department of Ceramic Engineering, Hanyang University

• CHUNG Yong-Chae

  CPRC, Department of Ceramic Engineering, Hanyang University

• Chung Y‐c

  Cprc Department Of Ceramic Engineering Hanyang University

• Ahn J

  Department Of Materials Science & Engineering Hanyang University

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