Current and future program of EUVL in Korea

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概要

• 論文の詳細を見る

• The EUV consortium consisting of Hynix Semiconductor, Samsung Electronics, will contracted with Postech, Hanyang Univ., Pohang Accelerator Laboratory, Korea Electro technology Research Institute to develop the EUVL technology. The first development goals of this consortium will be to establish the key technology modules on the sources and the defect free masks. We present the research results of analysis of multiplayer structure and characterization of defects. Mo/Si multilayers deposited by sputtering process for the application of extreme ultra-violet (EUV) reflector have been characterized. Since the control of d-spacing is critical for higher reflectivity, an effective and accurate d-spacing measurement technology is required. Even though cross-sectional TEM and low-angle XRD are standard methods in evaluating multilayers, they provide different d-spacing values from each other. Cross-sectional TEM images can give us direct measurement of individual layer but cannot describe the optical behavior of the multilayer. On the contrary, low-angle XRD analysis can provide the resultant d-spacing which include the non-ideal factors. As a result, low-angle XRD can predict EUV peak position more precisely compared to the TEM analysis. Results of at-wavelength inspection of EUVL mask substrate defects which were smoothed using multilayer coatings are presented. Programmed mask substrate defects were made with 80nm gold (Au) spheres, which were deposited on the mask substrate before the Mo/Si reflective multilayer coating. After coating, at-wavelength and visible-light inspection of the mask substrates were performed. The smoothing process was found to be effective in significantly suppressing the EUV visibility of the defects.

• 社団法人電子情報通信学会の論文
• 2002-06-26

著者

• AHN Jinho

  Hanyang University, Department of Materials Science and Engineering

• Kim O

  Pohang Univ. Sci. And Technol. Kyungbuk Kor

• Kim O

  Pohang Univ. Of Science And Technology

• Kim Ohyun

  Pohang Univ. Sci. And Technol. Pohang Kor

• Lee Seung

  Hanyang University

• Lee Seung

  Department Of Materials Science & Engineering Hanyang University

• Lee S

  Department Of Materials Science & Engineering Hanyang University

• Ahn J

  Materials Science And Engineering Hanyang University

• Ahn Jinho

  Deptartment Of Materials Engineering Hanyang University

• Ahn Jinho

  Hanyang University

• Yi Moonsuk

  Pohang Univ. of Science and Technology

• Kim Yong-Joo

  Korea Electrotechnology Research Institute

• Baik Sung

  Pohang Accelerator Laboratory

• Chun Young

  Pohang Accelerator Laboratory

• Chung Y‐c

  Cprc Department Of Ceramic Engineering Hanyang University

• Ahn J

  Department Of Materials Science & Engineering Hanyang University

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