Two-dimensional Submicron Focusing of Hard X-rays by Two Elliptical Mirrors Fabricated by Plasma Chemical Vaporization Machining and Elastic Emission Machining
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概要
- 論文の詳細を見る
To realize submicron focusing of hard X-rays, elliptical mirrors were manufactured using the new fabrication methods of elastic emission machining and plasma chemical vaporization machining. Line focused X-ray beam profiles of each mirror was evaluated at the 1-km-long beamline of SPring-8, and this showed nearly diffraction-limited performances were achieved. A Kirkpatrick–Baez mirror unit equipping an automatic optical alignment system, in which the fabricated mirrors were used, was designed, constructed and confirmed to enable $200\times 200$ nm2 focusing of 15 keV X-ray.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-11-15
著者
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TAMASAKU Kenji
SPring-8/Riken
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ISHIKAWA Tetsuya
SPring-8/Riken
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YAMAMURA Kazuya
Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka Un
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SANO Yasuhisa
Department of Precision Science and Technology, Graduate School of Engineering, University of Osaka
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SOUVOROV Alexei
Spring-8/Japan Synchrotron Radiation Research Institute (JASRI)
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Yamauchi Kazuto
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Mori Yuzo
Research Center For Ultra-precision Science And Technology Osaka University
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Mimura Hidekazu
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Endo Katsuyoshi
Research Center For Ultra-precision Science And Technology Graduate School Of Engineering University
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Saito Akira
Department Of Neurosurgery Nagahama Red Cross Hospital
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Tamasaku Kenji
SPring-8/RIKEN, Kouto 1-1-1, Mikazuki, Hyogo 679-5148, Japan
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Yabashi Makina
SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), Kouto 1-1-1, Mikazuki, Hyogo 679-5148, Japan
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Yabashi Makina
SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan
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Ishikawa Tetsuya
SPring-8/RIKEN, Kouto 1-1-1, Mikazuki, Hyogo 679-5148, Japan
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Ishikawa Tetsuya
SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan
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Yamauchi Kazuto
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Yamada-oka 2-1, Suita, Osaka 565-0871, Japan
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Saito Akira
Department of Biological Chemistry, Yamaguchi University
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Endo Katsuyoshi
Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Yamada-oka 2-1, Suita, Osaka 565-0871, Japan
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Souvorov Alexei
SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), Kouto 1-1-1, Mikazuki, Hyogo 679-5148, Japan
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Saito Akira
Department of Applied and Bioapplied Chemistry, Graduate School of Engineering, Osaka City University
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Yamamura Kazuya
Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Yamada-oka 2-1, Suita, Osaka 565-0871, Japan
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Sano Yasuhisa
Department of Applied Physics, Tokyo Institute of Technology
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Sano Yasuhisa
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Yamada-oka 2-1, Suita, Osaka 565-0871, Japan
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YABASHI Makina
SPring-8, Japan Synchrotron Radiation Research Institute (JASRI)
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