Bias-Assisted Photochemical Planarization of GaN(0001) Substrate with Damage Layer

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概要

• 論文の詳細を見る

著者

• Yamauchi Kazuto

  Department Of Precision Science And Technology Graduate School Of Engineering Osaka University

• MATSUYAMA Satoshi

  Department of Advanced Pathobiology, Graduate School of Life & Environmental Sciences, Osaka Prefecture University

• Sadakuni Shun

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan

• Yagi Keita

  Ebara Corp., Fujisawa, Kanagawa 251-8502, Japan

• Murata Junji

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

• Sano Yasuhisa

  Department of Applied Physics, Tokyo Institute of Technology

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