Morphological Stability of Si(001) Surface Immersed in Fluid Mixture of Ultrapure Water and Silica Powder Particles in Elastic Emission Machining
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概要
- 論文の詳細を見る
We examined the Si(001) surface after immersion in a mixture of ultrapure water and silica powder particles by atomic force microscopy (AFM), spectroscopic ellipsometry and electron spectroscopy for chemical analysis (ESCA). The surface etching of Si(001) in the mixture fluid is found to be markedly suppressed, although the surface etching of Si(001) under aqueous conditions proceeds constantly. The surface microroughness after immersion in the mixture fluid can be maintained in the state it was in before immersion. It is suggested that the existence of silica powder particles in the ultrapure water affects the stability of the Si(001) surface morphology.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-08-15
著者
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Yamauchi Kazuto
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Inagaki Kouji
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Mori Yuzo
Research Center For Ultra-precision Science And Technology Osaka University
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Mimura Hidekazu
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Yumoto Hirokatsu
Department Of Precision Science And Technology Graduate School Of Engineering University Of Osaka
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Yamauchi Kazuto
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
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Kubota Akihisa
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
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Mimura Hidekazu
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
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Kubota Akihisa
Department of Mechanical Engineering and Materials Science, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
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Mori Yuzo
Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
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Yumoto Hirokatsu
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
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