Yagi Keita | Ebara Corp., Fujisawa, Kanagawa 251-8502, Japan
スポンサーリンク
概要
関連著者
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Yamauchi Kazuto
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Sadakuni Shun
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Yagi Keita
Ebara Corp., Fujisawa, Kanagawa 251-8502, Japan
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Murata Junji
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
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Sano Yasuhisa
Department of Applied Physics, Tokyo Institute of Technology
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SANO Yasuhisa
Department of Precision Science and Technology, Graduate School of Engineering, University of Osaka
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Arima Kenta
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Okamoto Takeshi
Department Of Cardiovascular Surgery Niigata City General Hospital
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Yamauchi Kazuto
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Murata Junji
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Inagaki Kouji
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Mimura Hidekazu
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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MATSUYAMA Satoshi
Department of Advanced Pathobiology, Graduate School of Life & Environmental Sciences, Osaka Prefecture University
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Pho Bui
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Hattori Azusa
Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Yagi Keita
Ebara Corporation, Fujisawa, Kanagawa 251-8502, Japan
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Tachibana Kazuma
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Asano Hiroya
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Isohashi Ai
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Mimura Hidekazu
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Inagaki Kouji
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Arima Kenta
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
著作論文
- Planarization of GaN(0001) Surface by Photo-Electrochemical Method with Solid Acidic or Basic Catalyst
- Improvement of Removal Rate in Abrasive-Free Planarization of 4H-SiC Substrates Using Catalytic Platinum and Hydrofluoric Acid
- Bias-Assisted Photochemical Planarization of GaN(0001) Substrate with Damage Layer