Novel Scheme of Figure-Error Correction for X-ray Nanofocusing Mirror

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概要

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• To improve the performance of an X-ray nanobeam, we demonstrate the in situ determination and correction of the figure error of an elliptical mirror. The phase error profile on the mirror surface, which represents the figure error, is numerically reconstructed from the X-ray intensity distribution measured at the focal plane. The figure error is corrected by depositing a Pt film on the surface with subnanometer thickness controllability. Results of focusing experiments and subsequent analysis show a great improvement in focusing performance.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2009-09-25

著者

• TAMASAKU Kenji

  SPring-8/Riken

• ISHIKAWA Tetsuya

  SPring-8/Riken

• YAMAMURA Kazuya

  Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka Un

• SANO Yasuhisa

  Graduate School of Engineering, Osaka University

• YAMAUCHI Kazuto

  Graduate School of Engineering, Osaka University

• NISHINO Yoshinori

  SPring-8/RIKEN

• Kimura Takashi

  Graduate School Of Engineering Nagoya Institute Of Technology

• Yabashi Makina

  SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan

• Yumoto Hirokatsu

  SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan

• Handa Soichiro

  Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

• Mimura Hidekazu

  Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

• Matsuyama Satoshi

  Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

• Ishikawa Tetsuya

  SPring-8/RIKEN, 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan

• Ishikawa Tetsuya

  SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan

• Yamauchi Kazuto

  Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

• Yamamura Kazuya

  Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

• YABASHI Makina

  SPring-8, Japan Synchrotron Radiation Research Institute (JASRI)

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