高圧マイクロジェットの洗浄力に関する研究 : —ノズル形状の違いが洗浄力に与える影響—

概要

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High Pressure Micro Jet (HPMJ), a kind of spray cleaning which makes liquid particles impinge to object with high speed, is widely employed in cleaning process for flat panel displays, semiconductors, etc. The purpose of this study is to improve the cleaning efficiency of HPMJ. First, noticing the spray nozzle that has vital function in all components of HPMJ for the cleaning liquid atomization, we have tried to improve shape design of the nozzle to get directional flow of the liquid which lead us to succeed in improvement of flying speed of liquid particles by 20% under the same pressure. Furthermore, it is found, through cleaning test with PSL particles, that this design improvement of the nozzle also improves the cleaning efficiency. From mutual relation between behaviors of liquid particles and results of cleaning test got in this study, it is found that the cleaning efficiency of HPMJ is in proportion to the flying speed of cleaning liquid particles and such speed improvement highly depends on shape design of the nozzle.Thus, it is confirmed that, in High Pressure Micro Jet system, improvement of nozzle design leads to better cleaning efficiency. Further, the improved nozzle can get same cleaning efficiency under lower pressure, which is expected to give environment favorable effects such as fewer consumption of cleaning liquid, reduced energy cost, etc.
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