マイクロNi-W電着ダイヤモンド工具の製作とシリコンの溝加工への適用

概要

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The present paper deals with a fabrication method of micro Ni-W electroplated diamond tools with a diameter of 100μm and their machining characteristics in grooving into silicon, in order to estimate the machining performance of the tools and optimize the fabrication conditions. In fabricating 2-4μm diameter grit tools, more uniform distribution of grits was obtained through the solution stirring by jet, which resulted in a reduction in tool life scatter. The optimal electric current density was obtained regarding tool condition and tool life. Cutting speed and feed rate were optimized from the viewpoint of tool life.
公益社団法人精密工学会の論文
2007-02-05