オートコリメーション方式深穴形状精度測定システムの開発(第2報) : 装置の試作および評価実験

概要

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The measuring system for evaluating the accuracy of a deep hole is developed by using the autocollimation principle. The system consists of a measuring unit and an optical system for light reception. The measuring unit comprises one laser diode, two mirrors, two quarter-wave plates, one polarizing beam splitter, and a feeler. The system detects the displacement of a feeler on the basis of the autocollimation principle. The optical system for light reception, which receives the laser beam irradiated from the laser diode in the measuring unit, comprises a plano-convex lens and a CCD camera. In this research, the measuring unit is manufactured for trial and its measuring accuracies are examined by using the basic experimental apparatus. As a result, the followings are clarified. The optimum values of the CCD image processing parameters are 60 in threshold and 250 μ s in exposure. The error of measurement by using the measuring unit is ±0.26 μm. Measurement error of its rotational angle is ±0.01°.
公益社団法人精密工学会の論文
2008-05-05