マイクロNi-W電着ダイヤモンド工具の製作と脆性材料の溝加工への適用 : 工具品質および加工性能の向上

概要

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The present paper intends to improve the tool quality and the machining performance of micro cylindrical Ni-W electroplated diamond tools. From the grooving tests of silicon the following results were obtained. The scatter of diamond grit density on the tool surface can be prevented through the intermittent pouring of electroplating solution into the solution with grit supported by a filter. Ni strike plating before electroplating is useful for extending the tool life, but it can result in the degradation of roughness on groove side surface. Tool wear may result from the removal of bond material due to generated chip and dropped diamond grit, therefore the usage of harder bond material and the heat treatment of bond material are recommended. For a constant tool diameter there exists a suitable grit diameter from the viewpoint of machining efficiency and groove roughness. In grooving of quartz glass, chippings of 10-20μm may occur on the groove edges, which can be prevented by the application of axial ultrasonic vibration to the tool.
公益社団法人精密工学会の論文
2008-06-05