マイクロ金型を用いたキャスティング法による低密度波長分割多重用アレイ導波路回折格子に関する研究(第一報) : −アレイ導波路回折格子製作方法の検討−

概要

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We proposed a fabrication process of an Arrayed Waveguide Grating (AWG) by a casting method using a micro die for the low cost Wavelength Division Multiplexing (WDM) system. We designed and made an optical simulation of the wavelength demultiplexing for the AWG. In order to fabricate the AWG with low cost and high accuracy, we proposed the fabrication process of the micro die by the electro-plating after fabricating the mother shape. We proposed the fabrication process of the mother shape using the SU-8 resist which is the negative resist. By using SU-8 resist, the high cost fabrication process using the dry etching equipments can be deleted. We fabricated the AWG with an UV cure material using the fabricated micro die. As the result, it has become possible to fabricate the AWG with low cost.
社団法人精密工学会の論文