P-1-6 回転傾斜露光法を用いた三次元マイクロ鋳型の製作とエレクトロポレーションデバイスへの応用(マイクロナノメカトロニクス,ポスター要旨講演)

概要

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In this paper, we propose a novel microfabrication technique without assembling process including alignment and bonding for 3-D micro-molds in microfludics. The proposed process can integrate microchannels with free path, orifices, and openings by using the inclined/rotated UV lithography with a characteristic single-mask of whole image exposure in a short period of time. In order to confirm the validity of the proposed fabrication process, we fabricated a micro-electroporation device with two flow channel to introduce cell and substance suspension, six orifices to fix the cell, two inlets and one outlet by using single-mask multidirectional photolithography. The immobilization efficiency of cells were investigated in the fabricated devices.
2011-03-18