1J2-4 マイクロLFB超音波材料解析システムのZnO単結晶評価への応用(測定技術,映像法,非破壊評価II)

概要

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We evaluated elastic homogeneities of ZnO single crystals by means of a micro-LFB ultrasonic material characterization system with an improved spatial resolution. We prepared four small ZnO single crystal specimens, with (100), (001), and (101) surfaces, grown by the hydrothermal synthesis method. LSAW velocity distributions were measured at 225MHz for each crystalline plane and cross-sectional surfaces of these specimens, resulting in detailed information associated with the crystal growth processes and conditions. This information could be fed back to improvement of the crystal quality. We also could prepare a standard specimen of YX-ZnO uncoupled with the piezoelectricity for the system calibration.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2009-11-18