1-01P-62 超音波マイクロスペクトロスコピー技術によるAIN単結晶の評価(ポスターセッション 1)

概要

論文の詳細を見る
Basic acoustic properties of AIN single crystals were eveluated using the line-focus-beam/plane-wave ultrasonic material characterization system. Velocities of leaky surface acoustic waves (LSAWs), longitudinal waves, and shear waves for Y- and Z-cut AIN specimens were measured at around 200 MHz. We obtained the great differences of 1.8% in LSAW velocity, 1.7% in longitudinal velocity, and 2.1% in shear velocity at the maximum as compared with the values calculated using published constants. Elastic constants of cE/<11>, cE/<12>, cE/<44>, and cE/<66>, and piezoelectric constant e_<15> were determined from the obtained bulk velocities, resulting in the great differences from the published constants, especially by 9% for cE/<12> and by 46% for e_<15>.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2007-11-14