1-01-01 超音波マイクロスペクトロスコピー技術によるZnO単結晶の評価(超音波物性・材料・フォノン物理)

概要

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We conducted preliminary experiments for developing a new ultrasonic method of evaluating resistivity distributions in ZnO single crystals using the line-beam ultrasonic material characterization system. We measured velocities of leaky surface acoustic waves at 225 MHz on three Z-cut ZnO specimens A, B, and C with low, high, and unknown resistivites. We obtained the great velocity changes of more than 50 m/s from the results of 2616 m/s for specimen A and 2669 m/s for specimen B, and evaluated specimen C with velocity distributions from 2612 m/s around the seed part to 2672 m/s for the outside part associated with the crystal growth, corresponding to the resistivity variations of 1-1000 Ω・m.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2007-11-14