A Novel Power MOSFET Structure with Shallow Junction Dual Well Design(Compound Semiconductor and Power Devices,<Special Section>Fundamentals and Applications of Advanced Semiconductor Devices)

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概要

• 論文の詳細を見る

• Vertical Power MOSFETs are widely designed by deep well structures for breakdown requirement. In this study, we proposed, simulated, and analyzed a "shallow dual well" structure Power MOSFET, which utilize an n-well to cover the conventional p-well. The cell pitch can be reduced and results in an increased cell density. The reduced cell pitch and increased cell density improves the gate charge and on resistance performances about 66.5% and 15.8% without sacrificing the device breakdown owing to a shallow junction design. In addition, with the dual well structure design, the breakdown point will occur at the center of the well. Therefore, the capability of avalanche energy can be improved about 1.9 times than the tradition well structure.

• 社団法人電子情報通信学会の論文
• 2007-05-01

著者

• Chiu Hsien

  Dept. Of Electronic Engineering Chang Gung University

• Wang Chi

  Dept. Of Electronic Engineering Feng Chia University

• Liao Chien

  Dep. Of Electrical Engineering National Central University

• LIAO Chien-Nan

  Dept. of Electrical Engineering, National Central University

• CHIEN Feng-Tso

  Dept. of Electronic Engineering, Feng Chia University

• WANG Chi-Ling

  Dept. of Electronic Engineering, Feng Chia University

• CHIU Hsien-Chin

  Dept. of Electronic Engineering, Chang Gung University

• CHAN Yi-Jen

  Dept. of Electrical Engineering, National Central University

• Chiu H‐c

  National Central Univ. Jungli Twn

• Chan Y‐j

  Dept. Of Electrical Engineering National Central University

• Chien Feng‐tso

  Dep. Of Electronic Engineering Feng Chia University

• Chien Feng-tso

  The R&d Dept. Chino-excel Technology Corp.:the Department Of Electrical Engineering Feng Chia Un

• Liao Chien-nan

  Dept. Of Electrical Engineering National Central University

• Liao Chien-nan

  Department Of Electrical Engineering National Central University

• Fang Chin-mu

  Department Of Electronic Engineering Feng-chia University

• Fang Chin-mu

  Dept. Of Electronic Engineering Feng-chia University

• Chiu Hsien-chin

  The Department Of Electrical Engineering National Central University

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