Low gate leakage current HEMTs by a new airbridge gate and a liquid oxidization surface (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))

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概要

• 論文の詳細を見る

• Conventional AlGaAs/InGaAs high electron mobility transistors (HEMTs) have high gate leakage current due to gate electrode contact to the exposed channel layer and the carrier provided layer on mesa sidewall. In this study, we used a new no step airbridge gate structure to reduce the gate leakage and improve the breakdown voltage. Furthermore, a liquid oxidization method is applied to further reduce the gate leakage. Those proposed methods didn't increase any masks as compared with the conventional process. In our study, the new airbridge gate structure shows smaller gate-source capacitance than the conventional structure. Therefore, the device high frequency performances can be improved. We will demonstrate the enhanced device characteristics of gate-to-drain breakdown voltages, RF and microwave power performances by using airbridge gate structure and conventional HEMTs.

• 社団法人電子情報通信学会の論文
• 2007-06-18

著者

• Chan Chien-liang

  Dep. Of Electronic Engineering Minghsin University Of Science And Technology University

• Liao Chien

  Dep. Of Electrical Engineering National Central University

• LIAO Chien-Nan

  Dept. of Electrical Engineering, National Central University

• CHIEN Feng-Tso

  Dept. of Electronic Engineering, Feng Chia University

• Chan Chien-Liang

  Dept. of Electronic Engineering, Feng Chia University

• Tsai Yao-tsung

  Dep. Of Electrical Engineering National Central University

• Chien Feng‐tso

  Dep. Of Electronic Engineering Feng Chia University

• Chien Feng-tso

  The R&d Dept. Chino-excel Technology Corp.:the Department Of Electrical Engineering Feng Chia Un

• Liao Chien-nan

  Dept. Of Electrical Engineering National Central University

• Liao Chien-nan

  Department Of Electrical Engineering National Central University

• Fang Chin-Mu

  Dept. of Electronic Engineering, Feng-Chia University

• Tsai Yao-Tsung

  Dept. of Electrical Engineering, National Central University

• Tsai Yao-tsung

  Dept. Of Electrical Engineering National Central University

• Tsai Yao-tsung.

  Department Of Electrical Engineering National Central University

• Liao Chien-nan

  Dep. Of Electrical Engineering National Central University

• Fang Chin-mu

  Department Of Electronic Engineering Feng-chia University

• Fang Chin-mu

  Dept. Of Electronic Engineering Feng-chia University

• Chen Chii-wen

  Dep. Of Electronic Engineering Minghsin University Of Science And Technology University

• Chan Chien-liang

  Dept. Of Electronic Engineering Feng-chia University

• Fang Chin-mu

  Dep. Of Electronic Engineering Feng Chia University

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