Improvement of the Leakage by Second Thermal Oxidation Process Power Trench Gate MOSFET(Session6: Power Devices)

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概要

• 論文の詳細を見る

• Power MOSFETs are used as control switches in many application. Comparing with bipolar junction transistor, power MOSFET can be employed in high frequency system because of its high switching speed The power trench gate MOSFET structure is suitable for low voltage system and believed to be a good solution for obtaining low specific on-resistance because of the lack of parasitic MET resistance and high cell density compares with the conventional power MOSFET. However, the high leakage current occurs from the gate and the source, which results from the loading effect, during the device etch process. In this study, we use second thermal oxidation process to form an oxidation layer to reduce the leakage.

• 社団法人電子情報通信学会の論文
• 2008-07-02

著者

• Chan Chien-liang

  Dep. Of Electronic Engineering Minghsin University Of Science And Technology University

• Huang Jhih-chao

  Dep. Of Electronic Engineering Feng Chia University

• Liao Chien

  Dep. Of Electrical Engineering National Central University

• Tsai Yao-tsung

  Dep. Of Electrical Engineering National Central University

• Chien Feng‐tso

  Dep. Of Electronic Engineering Feng Chia University

• Chien Feng-tso

  The R&d Dept. Chino-excel Technology Corp.:the Department Of Electrical Engineering Feng Chia Un

• Liao Chien-nan

  Dept. Of Electrical Engineering National Central University

• Liao Chien-nan

  Department Of Electrical Engineering National Central University

• Liao Chien-Nan

  Dep. of Electrical Engineering, National Central University

• Chien Feng-Tso

  Dep. of Electronic Engineering, Feng Chia University

• Chen Chii-Wen

  Dep. of Electronic Engineering, Minghsin University of Science and Technology University

• Tsai Yao-tsung

  Dept. Of Electrical Engineering National Central University

• Tsai Yao-tsung.

  Department Of Electrical Engineering National Central University

• Liao Chien-nan

  Dep. Of Electrical Engineering National Central University

• Fang Chin-mu

  Department Of Electronic Engineering Feng-chia University

• Fang Chin-mu

  Dept. Of Electronic Engineering Feng-chia University

• Chen Chii-wen

  Dep. Of Electronic Engineering Minghsin University Of Science And Technology University

• Fang Chin-mu

  Dep. Of Electronic Engineering Feng Chia University

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