5514 細胞修飾用マイクロシステムの研究 : コンセプトと微小針作製プロセス(J19-3 マイクロメカトロニクス(3),J19 マイクロメカトロニクス)

概要

論文の詳細を見る
This paper proposes a monitoring method for cell operation forces using a micro needle formed on a MEMS device. A fabrication process for the micro needle directly formed on a MEMS device was discussed and achieved. The micro needle was made of silicon and shaped by an isotropic dry etching. The needle was 86μm in length and 650nm in diameter at the needle tip. This needle chip was employed for monitoring forces inserting into biological organs. Since several ten micronewtons of the insertion force was assumed, our device was designed in order to detect the order of one hundred micronewtons. A prototype was built and applied to an orange grain, a few micrometers of inserting strain was successfully measured.
社団法人日本機械学会の論文
2006-09-15