MNM-P10-2 マイクロ発電システムのための整流機構(P10 マイクロエネルギー)

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In this paper, two rectification methods for micro-energy harvesting systems are proposed and estimated. We present two methods. One is a mechanical rectification. The other is a semiconductor rectification. Both of them, accompanied by a micro energy harvesting device on the same wafer, are fabricated by micromachining. Vibration-driven micro-energy harvester by micro electro mechanical systems (MEMS) technology is needed because the electrical power supply of micro sensors in wireless sensor network is becoming important. But most of the vibration-driven generators supply alternating-current and intermittent electro energy. For using, it is necessary to construct micro energy systems generating direct current. Therefore, we consider micro energy systems that are composed of vibration-driven micro-energy harvesters, rectifier and energy storage devices. In particular, we describe rectification in this paper.
2010-10-12