M7-4 マイクロ振動発電機への整流回路の集積(M7 ナノ・マイクロシステム)

概要

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Here we report our development of a micro fabrication process to integrate a semiconductor rectifier to an electrostatic, vibration-driven micro energy harvester. Besides the obvious advantage of integration to obtain a compact energy harvester, such an integration should make sense also from the efficiency point of view, because reduction of stray capacitance is a critical design consideration for electrostatic energy harvesting devices. The integration of a rectifier requires proper isolation of semiconductor diode devices in general, that ordinarily takes many steps including dopant diffusion, in order to have reverse-biased p-n junctions for electrical isolation. We propose and experimentally demonstrate a simplified process that takes advantage of the MEMS fabrication process that needs to be carried out anyway, to isolate the rectifying diodes by removing the substrate where necessary.
2009-10-15