MNM-5B-3 3次元マイクロ振動発電デバイスの周波数特性の研究(セッション 5B マイクロエネルギー)

概要

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In this paper we propose a design and fabrication method for three dimensional vibration structures for micro energy harvesting. Since many of actual ambient vibration energy sources are vibrating in unsteady directions, desirable vibration-driven generators ought to be designed to correspond to the three dimensional vibration. PDMS micro flexible structures were employed for this purpose. Hence, as PDMS has low Young's modulus, the PDMS cantilever has the low frequency characteristics. Available frequencies of the actual environment vibration sources are usually low ; therefore low frequency characteristics have advantages for the vibration-driven energy harvesting. The PDMS structure was made by the casting method using the SU-8 casting mold. The fabricated PDMS structure vibrates in various directions, X, Y and Z. The maximum displacement was 149 μm at 160 Hz in the Z direction. The fabricated PDMS cantilever has flexible and low frequency characteristics that are proper for vibration energy harvesting.
2010-10-12