T1601-1-5 3次元マイクロ振動発電デバイスの研究([T1601-1]マイクロナノメカトロニクス(1))

概要

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In this paper we propose a design and fabrication method for three dimensional vibration structures for micro energy harvesting. Many of actual ambient vibration energy sources are vibrating in unsteady directions, desirable vibration-driven generators ought to be designed for operating under the condition of the three dimensional vibration. PDMS micro flexible structures were employed for this purpose and the free-standing PDMS casting method using the SU-8 casting mold was proposed. And as PDMS has high damping coefficient, the PDMS cantilever has the low and wideband frequency characteristics. Available frequencies of the actual environment vibration sources are low and broad; therefore low and wideband frequency characteristics have advantages for the vibration-driven energy harvesting. The PDMS structure was made by the casting method. Excess PDMS was absorbed by the pools located in the SU-8 casting mold, unnecessary casting membranes well shown at the edge of the target PDMS structure were prevented. The PDMS cantilever had 900μm in length, 200μm in width, and 240μm in thickness. The resonant frequency was 295Hz, the half bandwidth was 150 Hz and the maximum displacement was 46μm. We considered the casting method for PDMS free-standing structures with no undesirable membranes and designed, fabricated and estimated that successfully.
一般社団法人日本機械学会の論文
2010-09-04