MNM-P1-4 ECRイオンビームスパッタ法によって作成されたFe-B-Nb-Nd磁性金属ガラスのナノインデンテーションによる機械的特性の研究(合同ポスターセッション P1 単結晶・多結晶シリコンの疲労寿命評価とメカニズムの解明)

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This paper presents some mechanical properties of Fe-B-Nb-Nd based soft magnetic metallic glass thin film that was investigated by nanoindentation testing using a Berkovich indenter with maximum loads of 5 mN and 10 mN. A specimen of the glassy thin film was deposited by electron cyclotron resonance (ECR) ion beam sputtering under 3×10^<-3> Pa of argon inert gas. In order to avoid unexpected effect of an underlying substrate to measured results such as hardness of substrate, thick film specimen of over 2μm was prepared for the nanoindentation testing. Hardness of the glassy film as a function of penetration depth and a composite modulus as a byproduct derived from an analysis of the load - displacement curve showed a cause of the indentation size effect. In addition, other factors affecting nanoindentation test data are discussed.
一般社団法人日本機械学会の論文
2010-10-12