Dislocation-Free Czochralski Si Crystal Growth without Dash Necking Using a Heavily B and Ge Codoped Si Seed
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-11-15
著者
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Huang X
Nanjing Univ. Nanjing Chn
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YONENAGA Ichiro
Institute for Materials Research, Tohoku University
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HUANG Xinming
Faculty of Education, Shinshu University
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HOSHIKAWA Keigo
Faculty of Education, Shinshu University
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TAISHI Toshinori
Faculty of Education, Shinshu University
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Hoshikawa Keigo
Faculty Of Education Shinshu University
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Huang Xinming
Faculty Of Education Shinshu University
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Yonenaga Ichiro
Institute for Material Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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TAISHI Toshinori
Faculty of Education, Shinshu University:(Permanent address)Faculty of Engineering, Shinshu University
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