517 マイクロプレス機を用いたメタルベースMEMS要素部品の製作(OS7 ナノ・マイクロ加工)

概要

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Metal base MEMS is proposed in the aim both of high productivity and cost reduction, that utilizes the micro-press machine and the aerosol deposition method. The micro-press, which is developed based on the concept ofMicrofactory', is good at fabricating micro structure from metal sheet with easy setup and low energy consumption. The aerosol deposition method can stack ceramics layer at room temperature with high rate, so that several microns thick of high performance functional ceramics layer can be: obtained in short time rather than conventional MEMS process. Combining these techniques, the basic punching experiment has been done by using the micro-press to the sus304 metal sheet, which has PZT ceramic-coated layer. Because we consider that a great cost reduction and simple process would be realized if the sheet metal with the ceramic layer could be processed at the same time. As the result of the experiment, micro beam structure of 100μm in width and 50μm in thickness has been made in precise successfully. Then, the peel of the ceramics layer was prevented by selection of an proper direction of punching.
社団法人日本機械学会の論文
2004-11-19