325 ダイヤモンドアレイ工具を応用した加工用AFMカンチレバーの開発(OS-16 微細加工と表面機能)

概要

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An AFM machining cantilever for the nanofabrication method called tribo-nanolithography (TNL) is developed in this study. In the TNL, machined area of single crystal silicon changes into amorphous phase. This area acts as mask against KOH, and therefore nanostructures are fabricated after the etching. To form the amorphous phase, a machining cantilever which has a diamond tip is used. In the tip fabrication, anisotropic and isotropic wet etching of single crystal silicon and HF-CVD were applied. The tip radius increased with an increase in time of isotropic wet etching. Finally, high-resolution nanostructure was fabricated using the developed cantilever. This indicates that the cantilever is effective tool for the TNL.
社団法人日本機械学会の論文
2006-11-24