マシニングセンタ型ナノ加工・計測システムの開発に関する研究

概要

論文の詳細を見る
A small precision nanomachining and measurement system was developed with a targeted machining resolution on the order of scales ranging from submicrons to several nanometers. The system was comprised of two machining functions, scratch machining and milling, and one measurement function. The scratch machining function was based on a frictional force microscope mechanism with a closed-loop numerical control (NC) to control the depth of the cut. A stiff cantilever was used for the scratch-machining function to permit nanomachining of hard and brittle materials such as silicon. The milling function used an original miniature tool that had a very small diamond mounted on it that permitted micromachining. The measurement function incorporated into this system used the same mechanism as the scratch-machining function, and provided a degree of precision almost equal to that of atomic force microscopy. After constructing this system, we performed various machining tests with it to confirm that the integrated NC closed-loop control function performed correctly.
社団法人精密工学会の論文
2008-11-05