227 ナノファクトリーのための自立型ナノ加工・計測システムの開発(OS-6超精密加工)

概要

論文の詳細を見る
In this study, we developed precision processing equipment that has processing mechanism by a shaper system and a milling system. Precision processing mechanism by a shaper system has an edge of a CVD diamond on the tip of a cantilever for frictional force microscopes (FFM). And precision milling mechanism has an edge of a pyramidal CVD diamond on the tip of a spindle. This equipment can do processing and the measurement in ranges from nanometers to micrometers. This report will introduce about the concept and mechanism of this equipment.
社団法人日本機械学会の論文
2006-11-24