ナノスケール機械加工とアルカリエッチングを併用した単結晶シリコン表面のマイクロファブリケーション(第2報) : マスキング作用の加工条件依存性と3次元微細構造への応用

概要

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This study aims to fabricate 3 dimensional microstructures on single crystal silicon by nano-scale machining using mechanism of friction force microscope (FFM) and subsequent alkaline etching. Machined area by diamond tip acts as a mask against KOH solution because of formation of amorphous layer, and consequently microstructure can be fabricated. The influence of machining conditions on masking effect is studied. As a result, it is found that masking effect can be controlled by adjusting normal load and pitch of machining line. In this way, mechanism of height change is investigated, and also 3 dimensional microstructure can be fabricated with precise control of machining parameters.
社団法人精密工学会の論文
2004-12-05