シリコンモールドを用いたダイヤモンドアレイ工具の開発と応用(第1報) : シリコンモールドによるダイヤモンドアレイ工具の作製

概要

論文の詳細を見る
In this study, we proposed a fabrication process of diamond array tool for micro-to-nano machining. The diamond array tools are fabricated by depositing polycrystalline diamond using CVD on silicon molds which are made by anisotropic wet etching of the single crystal silicon. It has a characteristic which can control a tip shape of cutting edge with different silicon planes. Moreover, the sizes and the arrangements of cutting edge are decided minutely by changing mask pattern on silicon substrate. The diamond array tools are expected to have a possibility of industrial applications as a micro-to-nano machining tool.
社団法人精密工学会の論文
2004-11-05