225 ダイヤモンドアレイ工具を用いた精密加工に関する研究(OS-6 超精密加工)

概要

論文の詳細を見る
In this study, we developed a diamond micro milling tool for micro-to-nano scale machining. This tool is manufactured by attaching a diamond cutting edge to tip of rotational axis. The diamond cutting edge with various shapes named "diamond array tool" are fabricated by depositing polycrystalline diamond using CVD on silicon molds which are made by anisotropic wet etching of the single crystal silicon. By using this micro milling tool to machining for metallic glass, the micro groove and step structure were fabricated with high efficiency and accuracy.
社団法人日本機械学会の論文
2006-11-24