MP-53 非線形自励発振するマイクロカンチレバープローブの応答振幅(ポスターセッション)

概要

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When you observe biological samples in liquid by using an Atomic Force Microscopy (AFM), it is difficult to estimate the eigen frequency of microcantilever from the frequency response curve based on external excitation, because of low Quality factor of frequency response curve due to the high viscosity. For the measurement of biological samples which can be deformed on weak impact, it is important subject to oscillate cantilever with a low-amplitude without contact of the tip of the cantilever to the sample. In order to overcome these difficulties, we have proposed a control method by nonlinear feedback and realized the dynamics of van der Pol oscillator in the microcantilever probe; van der Pol oscillator has the response frequency corresponding to the natural frequency and produces a limit cycle due to the nonlinearity and its magnitude determes the steady state amplitude of the oscillator. By applying the linear and nonlinear viscous damping forces based on the feedback of the deflection of the microcantilever, we experimentally establish a van der Pol-type self-excited microcantilever probe. High-gain nonlinear feedback carries out a low response amplitude with 1.5nm. It is confirmed that the response frequency is approximately equal to the natural frequency of the microcantilever probe.
一般社団法人日本機械学会の論文
2011-09-25