4218 オンデマンド型メタルベースMEMS製造システムの開発(J24-1 生産機械のマイクロ化(1))

概要

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On-demand manufacturing system for metal-based MEMS has been developed in trial. The system is composed by serial connection of several unit process cells. Each cell has its own process, such as punching press, Aerosol Deposition (AD) for ceramics coating, heat treatment and ink-jet wiring print. In the punching process, the divided progressive micro-press machine fabricates MEMS-like micro-mirror structure made of stainless steel. The processed part is fed to next AD cell; PZT ceramics actuator element is molded by AD process. After post processes of annealing, wiring and polarizing, the mirror device is completed, and it shows the performance better than one made of single crystal silicon. The system feeds one part step by step in single line, so it is better to control amount of product, compare to batch process system used in ordinary MEMS process. The developed setup does not only proof the ability of lower cost and higher flexibility as a manufacturing system, but also gets better performance as MEMS-like scanner mirror device.
社団法人日本機械学会の論文
2007-09-07