Fabrication of Submicron Grating Patterns Usinc Compositional Disordering of AlGaAs-GaAs Superlattices by Focused si Ion Beam Implantation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1987-04-20
著者
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Morita T
Chiba Univ. Chiba Jpn
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HASHIMOTO Hisao
Optoelectronic Joint Research Laboratory
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Ishida K
Yamagata Univ. Yamagata Jpn
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ISHIDA Koji
Optoelectronics Joint Research Laboratory
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MORITA Tetsuo
Optoelectronics Joint Research Laboratory
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MIYAUCHI Eizo
Optoelectronics Joint Research Laboratory
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TAKAMORI Takeshi
Optoelectronics Joint Research Laboratory
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NAKASHIMA Hisao
Optoelectronics Joint Research Laboratory
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FUKUNAGA Toshiaki
Optoelectronics Joint Research Laboratory
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Morita T
Optoelectronics Joint Research Laboratory
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FUKUNAGA Tsuneshi
Department of Materials Science and Ceramic Technology, Shonan Institute of Technology
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Ishida K
Taiyo Yuden Co. Ltd.
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Miyauchi E
Fujitsu Ltd. Kanagawa
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Nakashima H
Hyogo University
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Morita T
Sumitomo Electric Inductries Ltd. Yokohama
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Fukunaga T
New Cosmos Electric Co. Ltd. Osaka Jpn
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Takamori T
Opto-electronics Laboratories R&d Group Oki Electric Industry Co. Ltd.
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Ishida Koji
Optoelectoronic Industry And Technology Development Association:(present Address)chitose Institute O
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石田 謙司
神戸大学 大学院工学研究科
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