Reduced Damage Generation in GaAs Implanted with Focused Be Ions

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Arsenic Pressure Dependence of Interdiffusion of AlGaAs/GaAs Interface in Quantum Well
Comparison of Lateral Resolution of Fine Stripes Beryllium and Boron Implanted by Focused Ion Beam in Si-Doped AlGaAs/GaAs Multiquantum Wells
Fabrication of Submicron Grating Patterns Usinc Compositional Disordering of AlGaAs-GaAs Superlattices by Focused si Ion Beam Implantation
Fabrication of Index-Guided AlGaAs MQW Lasers by Selective Disordering Using Be Focused Ion Beam Implantation
SIMS Study of Compositional Disordering in Si Ion Implanted AlGaAs-GaAs Superlattice
Suppression of Beryllium Diffusion by Incorporating Indium in AlGaAs for HBT Applications using Molecular Beam Epitaxy
High-Power 650-nm-Band AlGaInP Visible Laser Diodes Fabricated by Reactive Ion Beam Etching Using Cl_2/N_2 Mixture
Reduction of Aspect Ratio in 650 nm-Band Self-Sustained-Pulsing Lasers with Saturable-Absorbing Layer
Extremely Low Astigmatism and Aspect Ratio in 650nm-Band Self-Pulsing AlGaInP Lasers with Strained-Quantum-Well Saturable-Absorbing Layer
650nm-Band High Power AlGaInP Visible Laser Diodes Fabricated by Reactive Ion Beam Etching Using Cl_2/N_2 Mixture
Damage Profile in GaAs, AlAs, AlGaAs, and GaAs/AlGaAs Superlattices Induced by Si^+-Ion Implantation
Thermal Diffusion of Buried Beryllium and Silicon Layer in GaAs Doped by Focused Ion Beam Implantation
Alignment Signal from a Mark Deformed by Molecular Beam Epitaxial Overgrowth for Focused Ion Beam Implantation
Cleaning of MBE GaAs Substrates by Hydrogen Radical Beam Irradiation
Growth-Interrupted Interfaces in Multilayer MBE Growth of Gallium Arsenide
Si Depth Profiles in Focused-Ion-Beam-Implanted GaAs
GaAs Growth Using an MBE System Connected with a 100 kV UHV Maskless Ion Implanter
Reduced Damage Generation in GaAs Implanted with Focused Be Ions
Pd-Ni-Si-Be-B Liquid Metal Ion Source for Maskless Ion Implantation
Novel Method for Measuring Intensity Distribution of Focused Ion Beams
Focused Si Ion Implantation in GaAs
GaAs Molecular Beam Epitaxy on Be Implanted GaAs Layers
Lateral Spreads of Be and Si in GaAs Implanted with a Maskless Ion Implantation System
Sn Ion Doping during GaAs MBE with Field Ion Gun
Alignment Accuracy of Focused Ion Beam Implantation
Dependene of Focused Ion Beam Intensity Profile on Ion Species at Several Orders of Magnitude below the Peak Intensity
Novel Methods for Measuring Diameter of Focused Ion Beam
Positional Stability of Focused Ion Beams
Numerical Study of Effect of Fabrication Damage on Carrier Dynamics in MQW Narrow Wires
Zn and Si Ion Emission from Au-Zn-Si LM Ion Source
Effect of Ambient Gases on Emission Properties of Pd-Ni-Si-Be-B LM Ion Source
Emission Stability of Au-Si-Be LM Ion Source in Various Gas Environments
Emission Characteristics of Au-Si-Be LM Ion Source
Formation of n-Layer in In_Ga_As by Si Implantation
A 100 kV Maskless Ion-Implantation System with an Au-Si-Be Liquid Metal Ion Source for III-V Compound Semiconductors
Fabrication of Sub-100 nm Wires and Dots in GaAs/AlGaAs Multiquantum Well Using Focused Ion Beam Lithography
Topographical Contrast of Secondary Electron Intensity Profiles in Focused Ion Beam Implantation : Techniques, Instrumentations and Measurement
Au-Si-Be Liquid Metal Ion Source for Maskless Ion Implantation

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