Damage Profile in GaAs, AlAs, AlGaAs, and GaAs/AlGaAs Superlattices Induced by Si^+-Ion Implantation

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1986-05-20

著者

• MATSUI Kensuke

  Research Center for Quantum Effect Electronics, Tokyo Institute of Technology

• MATSUI Ken-ichi

  Department of Physics, Faculty of Science, Osaka University

• NAKASHIMA Hisao

  Optoelectronics Joint Research Laboratory

• FUKUNAGA Toshiaki

  Optoelectronics Joint Research Laboratory

• MATSUI Kazunori

  Optoelectronics Joint Research Laboratory

• BAMBA Yasuo

  Optoelectronics Joint Research Laboratory

• FUKUNAGA Tsuneshi

  Department of Materials Science and Ceramic Technology, Shonan Institute of Technology

• BAMBA Yasuo

  Fujitsu Laboratories Ltd.

• Narusawa Tadashi

  Optoelectronics Joint Research Laboratory

• Narusawa T

  Matsushita Res. Inst. Tokyo Kawasaki Jpn

• Bamba Y

  Fujitsu Laboratories Ltd.

• Bamba Yasuo

  Fujitsu Laboratories Limited

• TAKATANI Shin-ichiro

  Central Research Laboratory, Hitachi, Lid.

• Takatani Shin-ichiro

  Central Research Laboratory Hitachi Lid.

• Fukunaga T

  New Cosmos Electric Co. Ltd. Osaka Jpn

• Matsui Kazunori

  Department Of Chemistry College Of Engineering Kanto Gakuin University

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