Effect of Ambient Gases on Emission Properties of Pd-Ni-Si-Be-B LM Ion Source
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概要
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The effects of ambient gases on emission properties of a Pd-Ni-Si-Be-B LM (liquid metal) ion source have been studied. Oxygen and water vapor had a significant effect on the ion emission stability. A decrease in B ion flux was also observed as the operating period continued. This decrease is explained by the selective evaporation of B oxide in the alloy formed by a reaction between boron and water vapor. Very stable and reliable ion emission with a long lifetime (exceeding 100 hours) was obtained by operating the source in a 8×10^<-9>Torr UHV.
- 社団法人応用物理学会の論文
- 1987-02-20
著者
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HASHIMOTO Hisao
Optoelectronic Joint Research Laboratory
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MIYAUCHI Eizo
Optoelectronics Joint Research Laboratory
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Miyauchi E
Fujitsu Ltd. Kanagawa
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ARIMOTO Hiroshi
Optoelectronics Joint Research Laboratory
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Arimoto H
Fujitsu Lab. Ltd. Atsugi Jpn
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