Emission Characteristics of Au-Si-Be LM Ion Source
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概要
- 論文の詳細を見る
Variation of relative fluxes of ion species emitted from a Au-Si-Be liquid metal (LM) ion source with various alloy compositions has been studied for the practical use of the ion source. The Si ion flux (Si^++Si^<++>) decreases with an increase in Be concentration because of the reduction of Si solubility in the molten alloy. As the flux of Si ions decreases, the ratio of Si^<++>/Si- increases remarkably. The mechanism of these phenomena is also discussed.
- 社団法人応用物理学会の論文
- 1985-05-20
著者
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HASHIMOTO Hisao
Optoelectronic Joint Research Laboratory
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MIYAUCHI Eizo
Optoelectronics Joint Research Laboratory
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Miyauchi E
Fujitsu Ltd. Kanagawa
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ARIMOTO Hiroshi
Optoelectronics Joint Research Laboratory
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Arimoto H
Fujitsu Lab. Ltd. Atsugi Jpn
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