超純水のみによる電気化学的加工法の研究 : 触媒反応を利用した超純水中のOH^-イオン密度の増加方法

概要

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In order to develop a new ultra-precision and ultra-clean machining method, electrochemical machining in ultrapure water was performed. A new method for increasing OH^- ion in ultrapure water using catalytic reaction that dissociates the water molecules into H^+ and OH^- ion was proposed. As examples, ion-exchange membrane and fabric were used. Also first-principles molecular dynamic simulations of interaction between water molecule and sulfonic acid function of ion-exchange material in order to analyze the mechanism of dissociation process of water molecule were performed. In the case of using sulfonated graft-polymerized polyethylene fabric, over 6A/cm^2 current density was obtained which suggests that the density of OH^- ion in ultrapure water increases to about one million times larger than in the case of without using catalytic reaction. As a result of machining experiments, etching were occurred for Cu. Mo and Fe anode under the condition of less than 2A/cm^2 of current density. Thus the possibility of electrochemical machining in ultrapure water for industrial application was confirmed.
社団法人精密工学会の論文
2001-06-05