Pulsed Laser Irradiation of Silicon-Germanium-on-Insulator (Si_<0.17>Ge_<0.83>OI) Substrates for Strain Relaxation and Defect Reduction
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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WANG Grace
Silicon Nano Device Lab., Dept. of Electrical and Computer Engineering, National University of Singa
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TOH Eng-Huat
Silicon Nano Device Lab., Dept. of Electrical and Computer Engineering, National University of Singa
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TRIPATHY S.
Silicon Nano Device Lab., Dept. of Electrical and Computer Engineering, National University of Singa
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SAMUDRA Ganesh
Silicon Nano Device Lab., Dept. of Electrical and Computer Engineering, National University of Singa
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YEO Yee-Chia
Silicon Nano Device Lab., Dept. of Electrical and Computer Engineering, National University of Singa
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Lo Guo-Qiang
Institute of Microelectronics
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Samudra Ganesh
Silicon Nano Device Lab. Dept. Of Electrical And Computer Engineering National University Of Singapo
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Samudra Ganesh
Silicon Nano Device Lab. Department Of Electrical And Computer Engineering National University Of Si
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Lo Guo-qiang
Silicon Nano Device Lab. Dept. Of Electrical And Computer Engineering National University Of Singapo
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Hoe Keat-mun
Institute Of Microelectronics (ime)
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Wang Grace
Silicon Nano Device Lab. Dept. Of Electrical And Computer Engineering National University Of Singapo
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Tripathy S.
Silicon Nano Device Lab. Dept. Of Electrical And Computer Engineering National University Of Singapo
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Hoe Keat-mun
Silicon Nano Device Lab. Dept. Of Electrical And Computer Engineering National University Of Singapo
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Yeo Yee-chia
Silicon Nano Device Lab. Dept. Of Electrical And Computer Engineering National University Of Singapo
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Yeo Yee-chia
Silicon Nano Device Lab. Dept. Of Electrical & Computer Engineering National University Of Singa
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Yeo Yee-chia
Silicon Nano Device Lab (sndl) Ece Department National University Of Singapore
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Yeo Yee-chia
Silicon Nano Device Lab. Department Of Electrical And Computer Engineering National University Of Si
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Samudra Ganesh
Silicon Nano Device Lab Dept. Of Ece National University Of Singapore (nus)
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WANG Xincai
Singapore Institute of Manufacturing Technology (SIMTECH)
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Toh Eng-huat
Silicon Nano Device Lab. Dept. Of Electrical And Computer Engineering National University Of Singapo
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Lo Guo-qiang
Agency For Science Technology And Research Institute Of Microelectronics
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Samudra Ganesh
Silicon Nano Device Lab. Department Of Electrical And Computer Engineering National University Of Si
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Yeo Yee-chia
Silicon Nano Device Lab. Department Of Electrical And Computer Engineering National University Of Si
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Wang Grace
Silicon Nano Device Lab, Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576
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Toh Eng-Huat
Silicon Nano Device Lab, Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576
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