Silicon Mach-Zehnder modulator using low-loss phase shifter with bottom PN junction formed by restricted-depth doping
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概要
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A silicon Mach-Zehnder modulator with a low-loss phase shifter formed by restricted-depth doping is fabricated and characterized. The phase shifter has a PN junction at the bottom of the rib waveguide, whereas the top of the rib is un-doped. Device simulations confirm that the phase-shifter loss is reduced by 26−28% with an increased phase-shifter length to keep a π phase shift with the same bias condition in comparison with a conventional PN junction through the whole depth. An optical loss as low as 1.6 dB has been achieved in the fabricated phase shifter with a 6-mm length. The Mach-Zehnder modulator with the phase shifter has a fiber-to-fiber loss of 9 dB. 10-Gbps non-return-to-zero on-off keying with extinction ratio of 11 dB is demonstrated under push-pull operation with a 6 Vpp driving voltage on each arm.
著者
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Kwong Dim-Lee
Institute of Microelectronics
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Lo Guo-Qiang
Institute of Microelectronics
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LIOW Tsung-Yang
Institute of Microelectronics
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Tu Xiaoguang
Institute Of Microelectronics
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Lim Soon
Institute of High Performance Computing, Agency of Science, Technology and Research, 1 Fusionopolis Way, #16-16 Connexis, Singapore 138632
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Dixit Vivek
Institute of High Performance Computing, Agency for Science, Technology and Research (A*STAR)
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Tan Yong
Power and Telecommunication Systems Company, Fujikura Ltd.
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Goi Kazuhiro
Optics and Electronics Laboratory, Fujikura Ltd.
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Ogawa Kensuke
Optics and Electronics Laboratory, Fujikura Ltd.
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Png Ching
Institute of High Performance Computing, Agency for Science, Technology and Research (A*STAR)
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Kwong Dim-Lee
Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR)
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Tu Xiaoguang
Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR)
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Lim Soon
Institute of High Performance Computing, Agency for Science, Technology and Research (A*STAR)
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Liow Tsung-Yang
Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR)
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