Direct Current and Microwave Characteristics of Sub-micron AlGaN/GaN High-Electron-Mobility Transistors on 8-Inch Si(111) Substrate
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概要
- 論文の詳細を見る
We report for the first time the DC and microwave characteristics of sub-micron gate ({\sim}0.3 μm) AlGaN/GaN high-electron-mobility transistors (HEMTs) on 8-in. diameter Si(111) substrate. The fabricated sub-micron gate devices on crack-free AlGaN/GaN HEMT structures exhibited good pin.-off characteristics with a maximum drain current density of 853 mA/mm and a maximum extrinsic transconductance of 180 mS/mm. The device exhibited unit current-gain cut-off frequency of 28 GHz, maximum oscillation frequency of 64 GHz and OFF-state breakdown voltage of 60 V. This work demonstrates the feasibility of achieving good performance AlGaN/GaN HEMTs on 8-in. diameter Si(111) for low-cost high-frequency and high-power switching applications.
- 2012-11-25
著者
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Lo Guo-Qiang
Institute of Microelectronics
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Arulkumaran Subramaniam
Temasek Laboratories Nanyang Technological University
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Ng Geok
School of EEE, Nanyang Technological University, Singapore 639798
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Tripathy Sudhiranjan
Institute of Materials Research and Engineering, 3 Research Link, Singapore 117602
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Vicknesh Sahmuganathan
Temasek Laboratories@NTU, Nanyang Technological University, Singapore 637553
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Wang Hong
School of EEE, Nanyang Technological University, Singapore 639798
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Ang Kian
Temasek Laboratories@NTU, Nanyang Technological University, Singapore 637553
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Tan Joyce
Institute of Materials Research and Engineering, 3 Research Link, Singapore 117602
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Lin Vivian
Institute of Materials Research and Engineering, 3 Research Link, Singapore 117602
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Todd Shane
Institute of Microelectronics, 11 Science Park Road, Science Park II, Singapore 117685
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VICKNESH Sahmuganathan
Temasek Laboratories@NTU, Nanyang Technological University
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Lo Guo-Qiang
Institute of Microelectronics, 11 Science Park Road, Science Park II, Singapore 117685
-
Arulkumaran Subramaniam
Temasek Laboratories@NTU, Nanyang Technological University, Singapore 637553
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Ang Kian
Temasek Laboratories, Nanyang Technological University, 50 Nanyang Drive, Research Techno Plaza, Singapore 637553
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