Low-Contact-Resistance Non-Gold Ta/Si/Ti/Al/Ni/Ta Ohmic Contacts on Undoped AlGaN/GaN High-Electron-Mobility Transistors Grown on Silicon
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概要
- 論文の詳細を見る
Low-contact-resistance (R_{\text{c}}) non-gold Ta/Si/Ti/Al/Ni/Ta ohmic contacts were realized on an undoped AlGaN/GaN high-electron-mobility transistor (HEMT) grown on a silicon substrate. Optimization of the rapid thermal process reveals that R_{\text{c}} decreases drastically from the annealing temperature of 700 to 850 °C and slightly increases from 875 to 900 °C. The sample annealed at 850 °C exhibited the lowest R_{\text{c}} of 0.22\pm 0.03 \Omega\cdotmm [specific contact resistivity, \rho_{\text{c}}=(0.78\pm 0.22)\times 10^{-6} \Omega\cdotcm<sup>2</sup>] with a smooth surface morphology (RMS roughness {\sim}5.5 nm). The low R_{\text{c}} is due to the formation of Ti<inf>x</inf>Si<inf>y</inf>and the intermixing of Ti<inf>x</inf>Si<inf>y</inf>with the bottom Ta layer at the metal/semiconductor interface.
- The Japan Society of Applied Physicsの論文
- 2013-11-25
著者
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Arulkumaran Subramaniam
Temasek Laboratories Nanyang Technological University
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Ang Kian
Temasek Laboratories@NTU, Nanyang Technological University, Singapore 637553
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NG Geok
NOVITAS-Nanoelectronics Centre of Excellance, Nanyang Technological Univ.
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HOFSTETTER Rene
NOVITAS-Nanoelectronics Centre of Excellance, Nanyang Technological Univ.
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WANG Hong
NOVITAS-Nanoelectronics Centre of Excellance, Nanyang Technological Univ.
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Kumar Chandra
Temasek Laboratories, Nanyang Technological University, 50 Nanyang Drive, Research Techno Plaza, Singapore 637553
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Li Yang
NOVITAS-Nanoelectronics Center of Excellence, School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798
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Anand Mulagumoottil
NOVITAS-Nanoelectronics Center of Excellence, School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798
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Ye Gang
NOVITAS-Nanoelectronics Center of Excellence, School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798
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Ang Kian
Temasek Laboratories, Nanyang Technological University, 50 Nanyang Drive, Research Techno Plaza, Singapore 637553
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Wang Hong
NOVITAS-Nanoelectronics Center of Excellence, School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798
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Ng Geok
NOVITAS-Nanoelectronics Center of Excellence, School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798
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