PLD法によりPVC基板上へ作製した酸化亜鉛系透明導電膜の成膜条件の最適化

概要

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Approximately 300 nm-thick Al-doped transparent conducting zinc oxide films (AZO(Al2O3:1.5 wt.%)) have been deposited on glass and PVC substrates by a pulsed laser deposition (PLD) using ArF excimer laser (λ=193 nm) with energy of 40-100 mJ at the repetition frequency of 50 Hz. When fabricated with the laser energy of 40-100 mJ, similar characteristics of electrical properties and optical transmittance were obtained for the AZO films deposited on glass or PVC substrates. Namely, the lowest resistivity obtained was 6.34×10-4Ω·cm and an average optical transmittance was more than 80 % in the visible range. But, when prepared with the laser energy of 80-100 mJ, surface roughness for the AZO films fabricated on PVC substrates decreased compared to the films deposited on glass substrates. Moreover, for the AZO films fabricated on PVC substrates, an average optical transmittance in the visible range was reduced to 30-50 %.
社団法人電気学会の論文
2006-01-01