X線ミラー用ナノ精度表面創成法の開発 : —形状修正加工の高分解能化とX線集光ミラーへの適応—

概要

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We developed computer-controlled figuring system having controllability of removal depth with nanometer level accuracy and spatial resolution close to 0.1 mm. In the system, Elastic Emission Machining (EEM) using nozzle type head and Microstitching Interferometry (MSI) are employed as a machining method and a figure measurement method. In EEM, the very small stationary machining spots are obtained, selecting small circle nozzle aperture of a 0.15 mm diameter. In this study we demonstrated computer controlled figuring, focusing on removal of high frequency figurer error, in the course of the fabrication of hard X-ray focusing mirror. Figure accuracy of 0. 2nm (RMS) is achieved at cross-sectional line profile with a length of 90nm. The fabricated X-ray mirror is evaluated at 1km-long beamline of SPring-8. Low background noise around main peak in the focused beam and improvement of image quality in the diverging beam are observed.